PAMBE growth of (1 1 (2)over-bar 2)-oriented GaN/AlN nanostructures on m-sapphire

被引:4
|
作者
Lahourcade, L. [1 ]
Renard, J. [1 ]
Kandaswamy, P. K. [1 ]
Gayral, B. [1 ]
Chauvat, M. P. [2 ]
Ruterana, P. [2 ]
Monroy, E. [1 ]
机构
[1] INAC SP2M NPSC, CEA Grenoble, CEA CNRS Grp Nanophys & Semicond, Grenoble 9, France
[2] CNRS ENSICAEN CEA UCBN, UMR 6252, CIMAP, F-14050 Caen, France
关键词
PAMBE; GaN; Semipolar; Quantum wells; Quantum dots; QUANTUM-WELLS;
D O I
10.1016/j.mejo.2008.07.067
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We report on the plasma-assisted molecular-beam epitaxial growth of (11 (2) over bar 2)-oriented GaN/AlN nanostructures on (1 (1) over bar 0 0) m-plane sapphire. Moderate N-rich conditions enable to synthesize AlN(1 1 (2) over bar 2) directly on m-sapphire, with in-plane epitaxial relationships [1 1 (2) over bar (3) over bar](AlN)parallel to[0 0 1 1](sapphire) and [1 (1) over bar 0 0](AlN)parallel to[1 1 (2) over bar 0](sapphire). In the case of GaN, a Ga-excess of one monolayer is necessary to achieve two-dimensional growth of GaN(1122). Applying these growth conditions, we demonstrate the synthesis of (1 1 (2) over bar 2)-oriented GaN/AlN quantum well structures, showing a strong reduction of the internal electric field. By interrupting the growth under vacuum after the deposition of few monolayers of GaN under slightly Ga-rich conditions, we also demonstrate the feasibility of quantum dot structures with this orientation. (C) 2008 Elsevier Ltd. All rights reserved.
引用
收藏
页码:325 / 327
页数:3
相关论文
共 50 条
  • [41] Planar semipolar (10(1)over-bar1) GaN on (11(2)over-bar3) sapphire
    Schwaiger, Stephan
    Argut, Ilona
    Wunderer, Thomas
    Roesch, Rudolf
    Lipski, Frank
    Biskupek, Johannes
    Kaiser, Ute
    Scholz, Ferdinand
    APPLIED PHYSICS LETTERS, 2010, 96 (23)
  • [42] Stranski-Krastanow growth of (11(2)over-bar2)-oriented GaN/AlN quantum dots
    Lahourcade, L.
    Valdueza-Felip, S.
    Kehagias, T.
    Dimitrakopulos, G. P.
    Komninou, P.
    Monroy, E.
    APPLIED PHYSICS LETTERS, 2009, 94 (11)
  • [43] Epitaxial growth of (1 1 (2)over-bar 0) ZnO on (0 1 (1)over-bar 2) Al2O3 by metalorganic chemical vapor deposition
    Liang, S
    Gorla, CR
    Emanetoglu, N
    Liu, Y
    Mayo, WE
    Lu, Y
    JOURNAL OF ELECTRONIC MATERIALS, 1998, 27 (11) : L72 - L76
  • [44] Demonstration of low resistance ohmic contacts to p-type (20(2)over-bar(1)over-bar) GaN
    Yonkee, Benjamin P.
    Farrell, Robert M.
    Leonard, John T.
    DenBaars, Steven P.
    Speck, Jim S.
    Nakamura, Shuji
    SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2015, 30 (07)
  • [45] Adsorption of NO and NO2 on the ZnO(2 (1)over-bar (1)over-bar 0) surface: A DFT study
    Breedon, M.
    Spencer, M. J. S.
    Yarovsky, I.
    SURFACE SCIENCE, 2009, 603 (24) : 3389 - 3399
  • [46] A study of dislocations in InGaN/GaN multiple-quantum-well structure grown on (1 1 (2)over-bar 0) sapphire substrate
    Bai, J
    Wang, T
    Izumi, Y
    Sakai, S
    JOURNAL OF CRYSTAL GROWTH, 2001, 223 (1-2) : 61 - 68
  • [47] Optical polarization characteristics of InGaN/GaN light-emitting diodes fabricated on GaN substrates oriented between (10(1)over-bar0) and (10(1)over-bar(1)over-bar) planes
    Masui, Hisashi
    Yamada, Hisashi
    Iso, Kenji
    Nakamura, Shuji
    DenBaars, Steven P.
    APPLIED PHYSICS LETTERS, 2008, 92 (09)
  • [48] Structural stability of scandium on nonpolar GaN (1 1 (2)over-bar 0) and (1 0 (1)over-bar 0) surfaces: A first-principles study
    Gonzalez-Hernandez, Rafael
    Martinez, Gustavo
    Lopez-Perez, William
    Arbey Rodriguez, Jairo
    APPLIED SURFACE SCIENCE, 2014, 288 : 478 - 481
  • [49] Stability of Magnesium-Incorporated Semipolar GaN(10(1)over-bar(1)over-bar) Surfaces
    Akiyama, Toru
    Ammi, Daisuke
    Nakamura, Kohji
    Ito, Tomonori
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2009, 48 (11)
  • [50] Growth and characterization of semipolar InGaN/GaN multiple quantum wells and light-emitting diodes on (10(1)over-bar(1)over-bar) GaN templates
    Chakraborty, Arpan
    Onuma, T.
    Baker, T. J.
    Keller, S.
    Chichibu, S. F.
    DenBaars, S. P.
    Nakamura, S.
    Speck, J. S.
    Mishra, U. K.
    PROGRESS IN SEMICONDUCTOR MATERIALS V-NOVEL MATERIALS AND ELECTRONIC AND OPTOELECTRONIC APPLICATIONS, 2006, 891 : 231 - +