Effects of interface-engineering on the internal structure and reflective characteristics of Cr/Sc multilayer mirrors

被引：0
|
作者：
Smertin, R. M. [1 ]
Barysheva, M. M. [1 ]
Chkhalo, N. I. [1 ]
Garakhin, S. A. [1 ]
Malyshev, I., V [1 ]
Polkovnikov, V. N. [1 ]
机构：
[1] RAS, Inst Phys Microstruct, Acad Skaya Str 7, Afonino 607680, Nizhny Novgorod, Russia
来源：
OPTICS EXPRESS | 2024年 / 32卷 / 15期
基金：
俄罗斯科学基金会;
关键词：
D O I：
10.1364/OE.524921
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Record reflectivity's of REXP=23.8% at 3.14 nm and RCALC=30.8% at 3.12 nm have been obtained for Cr/Sc mirrors. Such increases in reflection are the result of decreases in mixing of the system layers with each other due to the use of interface-engineering methods - passivation of the already deposited Cr layer with nitrogen before deposition of the subsequent Sc layer. However, it has been found that adding additional B4C layers to such a system leads to a decrease in reflectivity.
引用
收藏
页码：26583 / 26595
页数：13
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