Effects of interface-engineering on the internal structure and reflective characteristics of Cr/Sc multilayer mirrors

被引：0

作者：

Smertin, R. M. ^{[1
]}

Barysheva, M. M. ^{[1
]}

Chkhalo, N. I. ^{[1
]}

Garakhin, S. A. ^{[1
]}

Malyshev, I., V ^{[1
]}

Polkovnikov, V. N. ^{[1
]}

机构：

[1] RAS, Inst Phys Microstruct, Acad Skaya Str 7, Afonino 607680, Nizhny Novgorod, Russia

来源：

OPTICS EXPRESS | 2024年 / 32卷 / 15期

基金：

俄罗斯科学基金会;

关键词：

D O I：

10.1364/OE.524921

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Record reflectivity's of REXP=23.8% at 3.14 nm and RCALC=30.8% at 3.12 nm have been obtained for Cr/Sc mirrors. Such increases in reflection are the result of decreases in mixing of the system layers with each other due to the use of interface-engineering methods - passivation of the already deposited Cr layer with nitrogen before deposition of the subsequent Sc layer. However, it has been found that adding additional B4C layers to such a system leads to a decrease in reflectivity.

引用

页码：26583 / 26595

页数：13

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