Flexible Graphene FETs fabricated by Laser Induced Forward Transfer

被引:0
|
作者
Cheliotis, I. [1 ]
Logotheti, A. [1 ]
Andritsos, K. [1 ]
Zacharatos, F. [1 ]
Pesquera, A. [2 ]
Zurutuza, A. [2 ]
Zergioti, I. [1 ]
机构
[1] Natl Tech Univ Athens, Sch Appl Math & Phys Sci, Athens 15772, Greece
[2] Graphenea Headquarters, Paseo Mikeletegi 83, San Sebastian 20009, Spain
关键词
Laser Digital Transfer; Graphene; 2D electronics; laser additive manufacturing;
D O I
10.1117/12.3017463
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In this study, we utilize Laser-Induced Forward Transfer (LIFT) technology to digitally integrate single-layer graphene pixels, as well as source and drain (S/D) metal electrodes, onto PDMS and Kapton PI substrates. This is done for the purpose of developing a flexible Graphene Field Effect Transistor (GFET). We showcase the direct integration of intact graphene pixels with lateral dimensions ranging from 40 to 200 mu m in between the S/D electrodes. The transferred pixels exhibit high structural quality and a low defect density due to the solvent-free, single-step transfer process. To attain this level of transfer quality, we conducted a thorough investigation and optimization of the laser transfer process parameters (e.g. laser fluence, beam shape and size, alignment), tailored to the flexible substrates we're interested in. The structural integrity of the transferred pixels was confirmed through characterization techniques involving optical microscopy, Raman spectroscopy, and electrical measurements. Furthermore, we fabricated the Source, Drain, and Gate electrodes using a combination of LIFT and laser sintering of metal nanoparticle inks. Initially, we achieved the fabrication of micro-patterns with the desired geometry and a minimum feature size of < 50 mu m, through LIFT. Subsequently, laser sintering, a method fully compatible with metal nanoparticle inks or pastes and thermally sensitive substrates, was selectively applied to the printed patterns, resulting in high electrical conductivity (with reported resistivity as low as 3 times the bulk value). The electrical performance of the laser-printed and sintered patterns was assessed using a 4-point probe IV station. The results we demonstrated underscore the adaptability and versatility of LIFT for transferring low-dimensional materials, particularly single-layer graphene and metal nanoparticles with an average diameter of 50 nm. This technology provides a digital solution for addressing complex use-cases and applications in the field of electronics, particularly for the next generation of flexible GFETs.
引用
收藏
页数:7
相关论文
共 50 条
  • [21] LASER INDUCED FORWARD TRANSFER FOR MATERIALS PATTERNING
    Palla-Papavlu, Alexandra
    Dinca, Valentina
    Lippert, Thomas
    Dinescu, Maria
    ROMANIAN REPORTS IN PHYSICS, 2011, 63 : 1285 - 1301
  • [22] Laser induced forward transfer of soft materials
    Palla-Papavlu, A.
    Dinca, V.
    Luculescu, C.
    Shaw-Stewart, J.
    Nagel, M.
    Lippert, T.
    Dinescu, M.
    JOURNAL OF OPTICS, 2010, 12 (12)
  • [23] Laser-induced forward transfer of biomolecules
    Fernández-Pradas, JM
    Colina, M
    Serra, P
    Domínguez, J
    Morenza, JL
    THIN SOLID FILMS, 2004, 453 : 27 - 30
  • [24] Flexible and Highly Sensitive Strain Sensor Based on Laser-Induced Graphene Pattern Fabricated by 355 nm Pulsed Laser
    Jeong, Sung-Yeob
    Ma, Yong-Won
    Lee, Jun-Uk
    Je, Gyeong-Ju
    Shin, Bo-sung
    SENSORS, 2019, 19 (22)
  • [25] Transfer of particles by laser-induced forward transfer technique
    Nakata, Y
    Okada, T
    Maeda, M
    CLEO(R)/PACIFIC RIM 2001, VOL I, TECHNICAL DIGEST, 2001, : 52 - 53
  • [26] A sensor for adenosine triphosphate fabricated by laser-induced forward transfer of luciferase onto a poly (dimethylsiloxane) microchip
    Tsuboi, Yasuyuki
    Furuhata, Yosuke
    Kitamura, Noboru
    APPLIED SURFACE SCIENCE, 2007, 253 (20) : 8422 - 8427
  • [27] Facile fabrication of flexible graphene FETs by sunlight reduction of graphene oxide
    Ma, Jia-Nan
    He, Yan
    Liu, Yan
    Han, Dong-Dong
    Liu, Yu-Qing
    Mao, Jiang-Wei
    Jiang, Hao-Bo
    Zhang, Yong-Lai
    OPTICS LETTERS, 2017, 42 (17) : 3403 - 3406
  • [28] Monolayer Photonic Micro-ring of Polystyrene Nanoparticles Fabricated by Optical Vortex Laser Induced Forward Transfer
    Umesato, Kei
    Kawaguchi, Haruki
    Takahashi, Kanta
    Miyamoto, Katsuhiko
    Kohri, Michinari
    Omatsu, Takashige
    2021 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO), 2021,
  • [29] Innovative Fabrication of Metal Alloy Structures via Laser-Induced Forward Transfer on Flexible Substrates
    Das, Ankit
    Ding, Chien-Fang
    SMALL METHODS, 2024, 8 (09)
  • [30] Printing of Crumpled CVD Graphene via Blister-Based Laser-Induced Forward Transfer
    Komlenok, Maxim S.
    Pivovarov, Pavel A.
    Dezhkina, Margarita A.
    Rybin, Maxim G.
    Savin, Sergey S.
    Obraztsova, Elena D.
    Konov, Vitaly I.
    NANOMATERIALS, 2020, 10 (06)