Experimental Study of Periodically Poled Piezoelectric Film Lithium Niobate Resonator at Cryogenic Temperatures

被引：0
|
作者：
Kramer, Jack [1 ]
Barrera, Omar [1 ]
Cho, Sinwoo [1 ]
Chulukhadze, Vakhtang [1 ]
Hsu, Tzu-Hsuan [1 ]
Lu, Ruochen [1 ]
机构：
[1] Univ Texas Austin, Austin, TX 78712 USA
来源：
2024 IEEE/MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM, IMS 2024 | 2024年
关键词：
acoustic resonator; cryogenic testing; lithium niobate; mm-wave; periodically poled piezoelectric film; thin film devices;
D O I：
10.1109/MS40175.2024.10600212
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This work reports the first study of periodically poled piezoelectric film (P3F) lithium niobate (LiNbO3) resonators at cryogenic temperatures. We experimentally investigate the temperature dependency of resonant frequencies and quality factor (Q) of higher-order Lamb modes up to 20 GHz between 80 degrees K and 297 degrees K, using a tri-layer P3F LiNbO3 resonators as the experimental platform. The supported thickness-shear Lamb modes between second-order symmetric (S2) and eleventh-order antisymmetric (A11) modes show temperature coefficients of frequency (TCF) averaging -68.8 ppm/K. Higher Q and more pronounced spurious modes are observed at lower temperatures for many modes. Upon further study, the cryogenic study will be crucial for identifying dominant loss mechanisms and origins of spurious modes in higher-order Lamb wave devices for millimeter-wave applications.
引用
收藏
页码：154 / 157
页数：4
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