Enhanced crystallinity of (Sr,Ba)Nb2O6 films on sapphire and alumina substrates

被引：1
|
作者：
Tumarkin, A. V. [2 ]
Ivleva, L. I. [1 ]
Prokhorov, K. A. [1 ]
Novikov, I. A. [1 ]
Voronov, V. V. [1 ]
Lykov, P. A. [1 ]
Yakushev, A. O. [1 ]
Bogdan, A.
Sapego, E. N.
机构：
[1] St Petersburg Electrotech Univ LETI, St Petersburg 197022, Russia
[2] Russian Acad Sci, Prokhorov Gen Phys Inst, Moscow 119991, Russia
来源：
THIN SOLID FILMS | 2024年 / 806卷
基金：
俄罗斯科学基金会;
关键词：
Strontium-barium niobate; Oriented ferroelectric films; Annealing; Microstructure; Chemical composition; SR0.6BA0.4NB2O6; THIN-FILMS; BARIUM STRONTIUM-TITANATE; ELECTRICAL-PROPERTIES; RAMAN-SCATTERING; SINGLE-CRYSTAL; NIOBATE FILMS; SBN; DIFFRACTION; FABRICATION; GROWTH;
D O I：
10.1016/j.tsf.2024.140528
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Barium-strontium niobate in thin film form can be considered as a prospective ferroelectric material for microwave applications due to high dielectric nonlinearity. Its performance is linked to film structure quality, and one method to achieve high-quality films on microwave substrates goes through the process of annealing. (Sr,Ba)Nb2O6 films of good crystallinity were formed on sapphire and alumina substrates by magnetron sputtering. The processes of recrystallization of films on single- and polycrystalline substrates under the conditions of ex situ annealing at temperatures of 1100-1200 degrees C were studied. Highly (00l) oriented films on sapphire substrate were obtained by the deposition in oxygen atmosphere at a substrate temperature of 900 degrees C with post-growth annealing in air at an annealing temperature of 1150 degrees C.
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页数：8
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