Demonstration of 99.9% single qubit control fidelity of a silicon quantum dot spin qubit made in a 300 mm foundry process

Commercially viable quantum computing will require large numbers of high-quality qubits. Therefore, leveraging the extensive capabilities of conventional CMOS technology is expected to accelerate the development of a fault-tolerant quantum computer. Here we report on the highest single-qubit control fidelity of 99.9% for any Si/SiO2 spin qubit fabricated in a 300 mm wafer process. This result represents an important milestone towards a large-scale silicon quantum processor on a single chip.