[1] Shenzhen Univ, Coll Phys & Optoelect Engn, State Key Lab Radio Frequency Heterogeneous Integr, Shenzhen 518060, Peoples R China
[2] Shenzhen Univ, Coll Phys & Optoelect Engn, Key Lab Optoelect Devices & Syst, Minist Educ & Guangdong Prov, Shenzhen 518060, Peoples R China
[3] Shenzhen Univ, Addit Mfg Inst, Shenzhen 518060, Peoples R China
[4] Shenzhen Univ, Shenzhen Key Lab Micronano Photon Informat Technol, Key Lab Optoelect Devices & Syst, Minist Educ & Guangdong Prov,THz Tech Res Ctr,Coll, Shenzhen 518060, Peoples R China