Surface asymmetry measurements by single-shot cyclic azimuthal shearing interferometry

被引：0
|
作者：
Joo, Ki-Nam [1 ]
Park, Hyo Mi [1 ]
机构：
[1] Chosun Univ, Dept Photon Engn, 309 Pilmun daero, Gwangju 61452, South Korea
来源：
CIRP ANNALS-MANUFACTURING TECHNOLOGY | 2024年 / 73卷 / 01期
关键词：
Metrology; Interferometry; Azimuthal shearing interferometer; ABERRATION;
D O I：
10.1016/j.cirp.2024.04.072
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A cyclic azimuthal shearing interferometer is devised for optical testing with a single-snapshot detection of surface asymmetry. A dove prism is used for azimuthal shearing of the wavefront, while a polarization-pixelated camera is adopted to capture four phase-shifted interferograms at once to calculate the wavefront gradient. Quantitative analysis is made subsequently using Zernike polynomials so as to identify relevant aberration components. The measurement point density turns out far higher than conventional Shack-Hartmann wavefront sensors, providing the potential of efficient real-time measurements for off-axis reflective optical systems intended for adaptive correction of EUV lithography and space telescopes. (c) 2024 CIRP. Published by Elsevier Ltd. All rights reserved.
引用
收藏
页码：401 / 404
页数：4
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