A MEMS-Type Ionization Vacuum Sensor With a Wide Measurement Range

被引：2
|
作者：
Zhao, Yanqing [1 ]
Li, Zhiwei [1 ]
He, Yidan [1 ]
Mao, Shuyu [1 ]
Guo, Dengzhu [1 ]
Wei, Xianlong [1 ]
机构：
[1] Peking Univ, Sch Elect, Key Lab Phys & Chem Nanodevices, Beijing 100871, Peoples R China
来源：
IEEE ELECTRON DEVICE LETTERS | 2024年 / 45卷 / 05期
基金：
中国国家自然科学基金;
关键词：
Current measurement; Electron sources; Voltage measurement; Thermionic emission; Silicon; Pressure measurement; Impact ionization; Ionization vacuum sensor; microelectromechanical system (MEMS); yttrium oxide; thermionic emission;
D O I：
10.1109/LED.2024.3382769
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The letter presents a MEMS-type ionization vacuum sensor based on electron emission from an on-chip thermionic electron source. The sensor employs a multilayer-stacked structure fabricated by anodic bonding technology, showing overall dimensions of 12 x 12 x 3.3 mm(3). Because of the efficient and stable electron emission of an yttrium oxide electron source, the sensor exhibits a wide linear response range from 1 x 10(-4) Pa to 100 Pa with a good repeatability, covering both high and medium vacuum regimes. It provides a new miniature vacuum sensor with a wide measurement range.
引用
收藏
页码：909 / 912
页数：4
相关论文
共 50 条
  • [41] Wide-range Load Sensor Using Vacuum Sealed Quartz Crystal Resonator for Simultaneous Biosignals Measurement on Bed
    Murozaki, Yuichi
    Arai, Fumihito
    2020 IEEE INTERNATIONAL CONFERENCE ON ROBOTICS AND AUTOMATION (ICRA), 2020, : 1015 - 1020
  • [42] Processing of Interferometric MEMS-type Reflective Display using Photoresist as Sacrificial Layer
    Park, Hyun-Chul
    Kim, Yong-Seog
    IDW'10: PROCEEDINGS OF THE 17TH INTERNATIONAL DISPLAY WORKSHOPS, VOLS 1-3, 2010, : 1631 - 1632
  • [43] Piezoelectric vibration-type tactile sensor with wide measurement range using elasticity and viscosity change
    Motoo, Kohei
    Fukuda, Toshio
    Arai, Fumihito
    Matsuno, Takayuki
    2006 IEEE/RSJ INTERNATIONAL CONFERENCE ON INTELLIGENT ROBOTS AND SYSTEMS, VOLS 1-12, 2006, : 1946 - 1951
  • [44] Wide dynamic range silicon diaphragm vacuum sensor by electrostatic servo system
    Miyashita, H
    Esashi, M
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2000, 18 (06): : 2692 - 2697
  • [45] A MEMS resonant vacuum gauge for high vacuum measurement
    Chen, Xi
    Hou, Zhanqiang
    Liu, Gao
    Zeng, Mi
    Wu, Xuezhong
    Xiao, Dingbang
    VACUUM, 2024, 228
  • [46] Design of Wide Temperature Range Resonant-Mode Absolute MEMS Pressure Sensor
    Xereas, George
    Allan, Charles
    Chodavarapu, Vamsy P.
    PROCEEDINGS OF THE 2015 IEEE NATIONAL AEROSPACE AND ELECTRONICS CONFERENCE (NAECON), 2015, : 232 - 236
  • [47] A Wide-Range and High-Resolution Detection Circuit for MEMS Gas Sensor
    Chen, Minqiang
    Peng, Shufeng
    Wang, Ningcheng
    Xu, Lei
    Lin, Fujiang
    Wu, Feng
    IEEE SENSORS JOURNAL, 2019, 19 (08) : 3130 - 3137
  • [48] MEMS Skin Friction Sensor with High Response Frequency and Large Measurement Range
    Guo, Huihui
    Wang, Xiong
    Liu, Tingting
    Guo, Zhijiang
    Gao, Yang
    MICROMACHINES, 2022, 13 (02)
  • [49] A Composite-Type MEMS Pirani Gauge for Wide Range and High Accuracy
    Chen, Shuo
    Feng, Liuhaodong
    Guo, Song
    Ji, Yucheng
    Zeng, Shuwen
    Peng, Xinlin
    Xu, Yang
    Hu, Tianbao
    Wu, Zhenyu
    Wang, Shinan
    SENSORS, 2023, 23 (03)
  • [50] A relax type wide range field sensor using Finemet
    Butvin, P
    Praslicka, D
    Blazek, J
    Butvinová, B
    SENSORS AND ACTUATORS A-PHYSICAL, 2003, 106 (1-3) : 22 - 25
12345