[1] Shanghai Jiao Tong Univ, Ruijin Hosp, Inst Med Chips, Sch Med, Shanghai 200025, Peoples R China
[2] Zhejiang Univ, Sch Mat Sci & Engn, State Key Lab Silicon & Adv Semicond Mat, Hangzhou 310027, Peoples R China
[3] Shanghai Univ, Sch Microelect, Shanghai 201800, Peoples R China
[4] Chinese Acad Sci, State Key Lab Transducer Technol, Shanghai Inst Microsyst & Informat Technol, Shanghai 200050, Peoples R China