Fine-structured oxide ceramics from a novel replication method

被引：5

作者：

Ye, Bora ^{[1
,2
]}

Kim, Eok-Soo ^{[1
]}

Cui, Mincan ^{[3
]}

Khim, Jeehyeong ^{[3
]}

Baik, Jeong Min ^{[2
]}

Kim, Hong-Dae ^{[1
]}

机构：

[1] Korea Inst Ind Technol, Green Mfg R&D Grp 3Rs, Ulsan 681310, South Korea

[2] Ulsan Natl Inst Sci & Technol, KIST UNIST Ulsan Ctr Convergent Mat, Sch Mat Sci Engn, Ulsan 689798, South Korea

[3] Korea Univ, Sch Civil Environm & Architectural Engn, 5 Anam Dong, Seoul 136701, South Korea

来源：

CERAMICS INTERNATIONAL | 2016年 / 42卷 / 09期

关键词：

Replication; Ceramics patterning; Pattern deformation; Polyvinyl alcohol; Shrinkage; LITHOGRAPHY; NANOSTRUCTURES; SILICA;

D O I：

10.1016/j.ceramint.2016.03.218

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Fine-structured oxide ceramics sintered bodies with sub-micrometer scales were fabricated by a replication method from mixed slurry of polyvinyl alcohol (PVA) and nanosized ceramic particles in water. By using this replication method and burn-out at various sintering temperatures, fine-structured line and space patterns with sizes as small as 300 nm were fabricated on surfaces of TiO2 and ZnO. The mechanism of pattern deformation was investigated and a general expression to predict the minimum pattern size was proposed based on the relationship between pattern size and grain size. The results demonstrated the feasibility of using this simple method to produce sintered oxide ceramic materials with various compositions and structures. (C) 2016 Elsevier Ltd and Techna Group S.r.l. All rights reserved.

引用

页码：10872 / 10878

页数：7

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