Comparative study of RF sputtered Fe2O3- and Fe3O4-doped indium saving indium tin oxide thin films

被引：0
|
作者：
Petrovska, Svitlana [1 ]
Sergiienko, Ruslan [2 ]
Ilkiv, Bogdan [1 ]
Nakamura, Takashi [3 ]
Ohtsuka, Makoto [3 ]
机构：
[1] Natl Acad Sci Ukraine, Frantsevich Inst Problems Mat Sci, 3 Omeliana Pritsaka Str, UA-03142 Kiev, Ukraine
[2] Natl Acad Sci Ukraine, Physicotechnol Inst Met & Alloys, Kiev, Ukraine
[3] Tohoku Univ, IMRAM, Sendai 9808577, Japan
来源：
MOLECULAR CRYSTALS AND LIQUID CRYSTALS | 2024年 / 768卷 / 08期
关键词：
Electrical properties; iron-doped indium tin oxide; optical properties; radio frequency sputtering; surface roughness; ELECTRICAL-PROPERTIES; ITO FILMS; TRANSPARENT;
D O I：
10.1080/15421406.2024.2348192
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
In present work the properties of iron-doped indium tin oxide (ITO) films with reduced to 50 mass% indium oxide content prepared by co-sputtering of ITO and Fe2O3 targets and ITO and Fe3O4 targets in mixed argon-oxygen atmosphere were studied by various methods. The influence of different working gas flow rates, RF power of iron oxide targets, type of doping oxide and heat treatment temperatures on the electrical, optical, structural, and morphological properties of the films was characterized by means of four-point probe method, ultraviolet-visible (UV-Vis) spectroscopy, X-ray diffraction and atomic force microscopy.
引用
收藏
页码：128 / 138
页数：11
相关论文
共 50 条
  • [21] DIRECTLY rf-SPUTTERED gamma -Fe2O3 THIN FILMS.
    Chen, Ga-Lane
    Sivertsen, J.M.
    Judy, J.H.
    IEEE Transactions on Magnetics, 1984, MAG-20 (05)
  • [22] MOSSBAUER AND MAGNETIC STUDY OF RF-SPUTTERED FE2O3 FILMS
    MARUSAK, LA
    MESSIER, R
    JOURNAL OF APPLIED PHYSICS, 1979, 50 (11) : 7630 - 7632
  • [23] Influence of substrate temperature and O2 row on the properties of RF-Magnetron-Sputtered indium-tin-oxide thin films
    Kim, T. S.
    Choi, C. H.
    Jeong, T. S.
    Shim, K. H.
    JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2007, 51 (02) : 534 - 538
  • [24] Direct electrochemistry of nanoparticulate Fe2O3 in aqueous solution and adsorbed onto tin-doped indium oxide
    McKenzie, KJ
    Marken, F
    PURE AND APPLIED CHEMISTRY, 2001, 73 (12) : 1885 - 1894
  • [25] Influence of thermal treatment in N2 atmosphere on chemical, microstructural and optical properties of indium tin oxide and nitrogen doped indium tin oxide rf-sputtered thin films
    Stroescu, H.
    Anastasescu, M.
    Preda, S.
    Nicolescu, M.
    Stoica, M.
    Stefan, N.
    Kampylafka, V.
    Aperathitis, E.
    Modreanu, M.
    Zaharescu, M.
    Gartner, M.
    THIN SOLID FILMS, 2013, 541 : 121 - 126
  • [26] Influences of indium tin oxide layer on the properties of RF magnetron-sputtered (BaSr)TiO3 thin films on indium tin oxide-coated glass substrate
    Kim, Tae Song, 1600, (32):
  • [27] Oxygen Induced Limitation on Grain Growth in RF Sputtered Indium Tin Oxide Thin Films
    Lamsal, Buddhi Sagar
    Huh, Yung
    Dubey, Mukul
    Manoj, K. C.
    Venkatesan, Swaminathan
    Qiao, Qiquan
    Galipeau, David
    Fan, Qi Hua
    2013 IEEE INTERNATIONAL CONFERENCE ON ELECTRO-INFORMATION TECHNOLOGY (EIT 2013), 2013,
  • [28] Room temperature ferromagnetism in Mn- and Fe-doped indium tin oxide thin films
    Venkatesan, M.
    Gunning, R. D.
    Stamenov, P.
    Coey, J. M. D.
    JOURNAL OF APPLIED PHYSICS, 2008, 103 (07)
  • [29] Magnetotransport and Mossbauer study of Fe3O4/γFe2O3 granular thin films
    Taniyama, T
    Kitamoto, Y
    Yamazaki, Y
    JOURNAL OF APPLIED PHYSICS, 2001, 89 (11) : 7693 - 7695
  • [30] INFLUENCES OF INDIUM TIN OXIDE LAYER ON THE PROPERTIES OF RF MAGNETRON-SPUTTERED (BASR)TIO3 THIN-FILMS ON INDIUM TIN OXIDE-COATED GLASS SUBSTRATE
    KIM, TS
    OH, MH
    KIM, CH
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1993, 32 (6A): : 2837 - 2841
12345