Promotion of Processability in a p-Type Thin-Film Transistor Using a Se-Te Alloying Channel Layer

被引:2
|
作者
Choi, Kyunghee [1 ]
Nam, Sooji [1 ]
Kim, Yong-Hae [1 ]
Oh, Himchan [1 ]
Kim, Inseo [2 ]
Lee, Kimoon [2 ]
Cho, Sung Haeng [1 ]
机构
[1] Elect & Telecommun Res Inst ETRI, Hyperreal Metaverse Res Lab, Daejeon 34129, South Korea
[2] Kunsan Natl Univ, Dept Phys, Gunsan 54150, South Korea
基金
新加坡国家研究基金会;
关键词
selenium-tellurium; room temperature growth; p-type semiconductor; thin-film transistor; complementary metal-oxide semiconductor (CMOS); FIELD-EFFECT TRANSISTORS; TELLURIUM; OXIDE; SELENIUM; CRYSTALLIZATION; DENSITY; METAL; GAP;
D O I
10.1021/acsami.3c18003
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
p-type thin-film transistors (pTFTs) have proven to be a significant impediment to advancing electronics beyond traditional Si-based technology. A recent study suggests that a thin and highly crystalline Te layer shows promise as a channel for high-performance pTFTs. However, achieving this still requires specific conditions, such as a cryogenic growth temperature and an extremely thin channel thickness on the order of a few nanometers. These conditions critically limit the practical feasibility of the fabrication process. Here, we report a high-performance pTFT incorporating a 60-nm-thick highly crystalline Se-Te alloyed channel layer, produced using pulsed laser ablation at room temperature. The Se0.5Te0.5 alloy system enhances crystalline temperature and widens the band gap compared to a pure Te channel. Consequently, this approach results in a field-effect mobility of 3 cm(2)/V<middle dot>s, with an on/off current ratio of 3 x 10(5), a subthreshold slope of 2.1 V/decade, and a turn-on voltage of 6.5 V, achieved through conventional annealing at 250 degrees C. To demonstrate its applicability in complementary circuit applications, we integrate a complementary-type inverter using a p-type Se0.5Te0.5 TFT and an n-type Al-doped InZnSnO, demonstrating a high voltage gain of 12 and a low static power consumption of 17 nW. This suggests that the Se-Te alloyed channel approach paves the way to a more straightforward and cost-effective process for Te-based pTFT devices and their applications.
引用
收藏
页码:23459 / 23466
页数:8
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