Monolithic integration of perovskite heterojunction on TFT backplanes through vapor deposition for sensitive and stable x-ray imaging

被引:7
|
作者
Li, Liqi [1 ]
Tao, Liting [1 ]
Wang, Lixiang [1 ]
Li, Yuyang [1 ]
Li, Jiawen [1 ]
Ni, Zhenyi [1 ]
Fang, Yanjun [1 ,2 ,3 ]
Yang, Deren [1 ,3 ]
机构
[1] Zhejiang Univ, Sch Mat Sci & Engn, State Key Lab Silicon & Adv Semicond Mat, Hangzhou 310027, Peoples R China
[2] Shanxi Zheda Inst Adv Mat & Chem Engn, Taiyuan 030024, Shanxi, Peoples R China
[3] Shangyu Inst Semicond Mat, Shaoxing 312366, Peoples R China
来源
SCIENCE ADVANCES | 2024年 / 10卷 / 17期
基金
中国国家自然科学基金;
关键词
PHOTOCONDUCTORS; RESOLUTION; FILMS;
D O I
10.1126/sciadv.adj8659
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
Metal halide perovskites exhibit substantial potential for advancing next-generation x-ray detection. However, fabricating high-performance pixelated imaging arrays remains challenging due to the substantial dark current density and stability issues associated with common organic-inorganic hybrid perovskites. Here, we develop a vapor deposition method to create the first all-inorganic perovskite heterojunction film. The heterojunction introduction effectively reduces the dark current density of detectors to about 0.8 nA<middle dot>cm(-2), satisfying thin-film transistor (TFT) integration standards, while also increases sensitivity to above 2.6 x 10(4) mu C<middle dot>Gy(air ) (-1)<middle dot>cm(-2), thus giving rise to a record low detection limit of <1 nGy(air)<middle dot>s(-1) among all polycrystalline perovskite-based x-ray detectors. The devices also demonstrate remarkable stability across multifarious demanding working conditions. Last, through monolithic integration of the heterojunction film with a 64 x 64 pixelated TFT array, we have achieved high-resolution real-time x-ray imaging, which paves the way for the application of all-inorganic perovskite in low-dose flat-panel x-ray detection.
引用
收藏
页数:10
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