Forming technology and research progress of material surface micropattern structure

被引:0
|
作者
Pei, Yunliang [1 ]
Yao, Yu [2 ]
Zou, Wenjun [1 ]
Peng, Jin [1 ]
Song, Xudong [1 ]
机构
[1] Henan Univ Technol, Coll Mat Sci & Engn, Zhengzhou 450001, Peoples R China
[2] Whitedove Abras Tools Co Ltd, Zhengzhou 450007, Peoples R China
来源
关键词
micropattern; hot embossing; etching; EDM; photolithography; 3D printing; MICRONEEDLE ARRAY; LASER; FABRICATION; SILICON; GLASS; EDM; INTERFERENCE; ENHANCEMENT; COMPONENTS; ELECTRODE;
D O I
10.11868/j.issn.1001-4381.2023.000578
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The forming technology of surface micropattern structure was widely used in practical manufacturing as a means to texture the surface of materials and to promote advanced and functional materials. The main methods of surface micropattern forming include hot embossing, chemical etching, electrical discharge machining(EDM), photolithography and 3D printing depending on the application areas of materials. The different surface micropattern structure forming techniques and the basic principles of preparing surface texturise functional materials were reviewed, and their practical applications in photovoltaics, electronic information, intelligent manufacturing, ultra-precision manufacturing and other fields were listed. The characteristics and scope of application of different surface micropattern structure forming technologies are summarized, and the key problems faced in realizing the surface texturisation and functionalization of materials are put forward, which provides certain reference for the micromachining technology of surface micropattern structures.
引用
收藏
页码:87 / 101
页数:15
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