Tin oxide(SnO2);
Thin film transistor (TFT);
Solution-process;
Interface;
GALLIUM TIN OXIDE;
LOW-TEMPERATURE;
ENHANCEMENT;
DEPOSITION;
VOLTAGE;
OXYGEN;
IN2O3;
D O I:
10.1016/j.surfin.2024.104333
中图分类号:
O64 [物理化学(理论化学)、化学物理学];
学科分类号:
070304 ;
081704 ;
摘要:
In this work, we developed a low -thermal -budget approach to realize high-performance solution -processed oxide thin-film transistors (TFTs). To construct high -quality dielectric/channel interface, the corrosion -resistant SnO 2 channel and further O 2 plasma pre-treatment were adopted to minimize the problematic interface defects. With this strategy, the afforded solution -processed SnO 2 TFTs exhibited improved electrical performance and stability, including a descent field-effect mobility ( mu FE ) of 21.4 cm 2 /V & sdot; s, high on/off ratio ( I on / I off ) of 10 9 , positive threshold voltage ( V th ) of 0.39 V, steep SS of 94.7 mV/dec, and small Delta V th of 0.08 and -0.03 V under PBS and NBS, respectively. This work demonstrates a promising fabrication approach for solution -processed oxide TFTs towards advanced applications.
机构:
State Key Laboratory on Integrated Optoelectronics,College of Electronic Science and Engineering,Jilin UniversityState Key Laboratory on Integrated Optoelectronics,College of Electronic Science and Engineering,Jilin University