High-performance ultrathin solution-processed SnO 2 top-gate thin-film transistors by constructing high-quality dielectric/channel interface

被引:1
|
作者
Kuang, Fenglan [1 ]
Wang, Jinxuan [1 ]
Zhao, Jun [2 ]
Long, Tao [2 ]
Li, Zheng [2 ,3 ]
机构
[1] Liming Vocat Univ, Sch Civil Engn & Architecture, Quanzhou 362000, Peoples R China
[2] Xiangtan Univ, Sch Mat Sci & Engn, Xiangtan 411105, Peoples R China
[3] Ludong Univ, Coll Phys & Optoelect Engn, Yantai 264025, Peoples R China
关键词
Tin oxide(SnO2); Thin film transistor (TFT); Solution-process; Interface; GALLIUM TIN OXIDE; LOW-TEMPERATURE; ENHANCEMENT; DEPOSITION; VOLTAGE; OXYGEN; IN2O3;
D O I
10.1016/j.surfin.2024.104333
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
In this work, we developed a low -thermal -budget approach to realize high-performance solution -processed oxide thin-film transistors (TFTs). To construct high -quality dielectric/channel interface, the corrosion -resistant SnO 2 channel and further O 2 plasma pre-treatment were adopted to minimize the problematic interface defects. With this strategy, the afforded solution -processed SnO 2 TFTs exhibited improved electrical performance and stability, including a descent field-effect mobility ( mu FE ) of 21.4 cm 2 /V & sdot; s, high on/off ratio ( I on / I off ) of 10 9 , positive threshold voltage ( V th ) of 0.39 V, steep SS of 94.7 mV/dec, and small Delta V th of 0.08 and -0.03 V under PBS and NBS, respectively. This work demonstrates a promising fabrication approach for solution -processed oxide TFTs towards advanced applications.
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页数:7
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