Mems capacitive humidity sensors based on different structures for low humidity applications

被引：0
|
作者：
Chen, Long [1 ]
Huang, Jianqiu [1 ]
机构：
[1] Southeast Univ, Key Lab MEMS, Minist Educ, Nanjing, Peoples R China
来源：
25TH ANNUAL CONFERENCE & 14TH INTERNATIONAL CONFERENCE OF THE CHINESE SOCIETY OF MICRO-NANO TECHNOLOGY, CSMNT 2023 | 2024年 / 2740卷
关键词：
D O I：
10.1088/1742-6596/2740/1/012019
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页数：3
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