Study on Low-Temperature Bonding and Reliability of Nano-Twin Copper Micro-Cone Array

被引:0
|
作者
Li, Chongyang [1 ]
Hu, Anmin [1 ]
Hang, Tao [1 ]
Wu, Yunwen [1 ]
Li, Ming [1 ]
机构
[1] Shanghai Jiao Tong Univ, Sch Mat Sci & Engn, Shanghai, Peoples R China
基金
中国国家自然科学基金;
关键词
nano-twin Cu; micro-cones; low-temperature bonding; bonding reliability;
D O I
10.1109/ICEPT59018.2023.10492412
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
nano-twin copper (nt-Cu) has been a promising bonding material for its capability to control the unidirectional growth of intermetallic compounds (IMCs) and suppress the formation of Kirkendall voids at bonding interface. Furthermore, copper nano/micro cones have been applied in the field of low-temperature solid-state bonding, where mechanical interlocking effects improve bonding strength. In this paper, nano-twin copper micro-cone array (MCA) with twin boundaries (111-orientation) nearly perpendicular to the substrate prepared by pulse deposition was used to bond with SAC305 solder ball. Shearing test results show that the bonding strength between nt-Cu MCA substrate and solder ball is about 50% higher than that of twin-free Cu MCA and ten times of flat Cu. Reliability tests results show that nt-Cu MCA will generate thicker IMCs with electroplated Sn than other two substrates after reflow, which promotes bonding. In addition, nt-Cu MCA can promote the unidirectional diffusion of Cu atoms along the twinning plane, facilitating unidirectional growth of IMCs, which improves bonding reliability.
引用
收藏
页数:4
相关论文
共 50 条
  • [1] Nanotwinned copper micro-cone array fabricated by pulse electrodeposition for low-temperature bonding
    Dong, Mengya
    Chen, Peixin
    Hang, Tao
    Li, Ming
    [J]. MATERIALS LETTERS, 2021, 290
  • [2] Anti-oxidation property of nanotwinned copper micro-cone array for low-temperature bonding
    Chen, Peixin
    Sun, Hongqi
    Dong, Mengya
    Hang, Tao
    Wu, Yunwen
    Li, Ming
    [J]. 2023 24TH INTERNATIONAL CONFERENCE ON ELECTRONIC PACKAGING TECHNOLOGY, ICEPT, 2023,
  • [3] Co micro-cone arrays with stable and uniform morphology for low-temperature solid-state bonding
    Lei, Han
    Hu, Hua
    Xie, Jiunan
    Hu, Anmin
    Li, Ming
    [J]. MATERIALS TODAY COMMUNICATIONS, 2023, 37
  • [4] Low temperature Cu-Cu direct bonding by (111) oriented nano-twin Cu
    Juang, Jing-Ye
    Chu, Yi-Cheng
    Lu, Chia-Ling
    Chen, Chih
    Tu, King-Ning
    [J]. 2017 5TH INTERNATIONAL WORKSHOP ON LOW TEMPERATURE BONDING FOR 3D INTEGRATION (LTB-3D), 2017, : 32 - 32
  • [5] Low-Temperature Bonding of Copper by Copper Electrodeposition
    Fukumoto, Shinji
    Nakamura, Koki
    Takahashi, Makoto
    Tanaka, Yuto
    Takahashi, Shoya
    Matsushima, Michiya
    [J]. MATERIALS TRANSACTIONS, 2022, 63 (06) : 783 - 788
  • [6] Electrodeposited Palladium Coating on Co Micro-Nano Cones Array for Low-Temperature Solid-State Bonding
    Xie, Jiunan
    Hu, Hua
    Chen, Peixin
    Lei, Han
    Hu, Anmin
    Wu, Yunwen
    Li, Ming
    [J]. ELECTRONIC MATERIALS LETTERS, 2024, 20 (03) : 326 - 336
  • [7] Electrodeposited Palladium Coating on Co Micro-Nano Cones Array for Low-Temperature Solid-State Bonding
    Jiunan Xie
    Hua Hu
    Peixin Chen
    Han Lei
    Anmin Hu
    Yunwen Wu
    Ming Li
    [J]. Electronic Materials Letters, 2024, 20 : 326 - 336
  • [8] An ambient temperature ultrasonic bonding technology based on Cu micro-cone arrays for 3D packaging
    Xu, Penghui
    Hu, Fengtian
    Shang, Jing
    Hu, Anmin
    Li, Ming
    [J]. MATERIALS LETTERS, 2016, 176 : 155 - 158
  • [9] Low Temperature Wafer Bonding by Copper Nanorod Array
    Wang, Pei-I
    Lee, Sang Hwui
    Parker, Thomas C.
    Frey, Michael D.
    Karabacak, Tansel
    Lu, Jian-Qiang
    Lu, Toh-Ming
    [J]. ELECTROCHEMICAL AND SOLID STATE LETTERS, 2009, 12 (04) : H138 - H141
  • [10] Silver Nanoparticle Paste for Low-Temperature Bonding of Copper
    Hani Alarifi
    Anming Hu
    Mustafa Yavuz
    Y. Norman Zhou
    [J]. Journal of Electronic Materials, 2011, 40 : 1394 - 1402