Polyacrylonitrile as an Efficient Transfer Medium for Wafer-Scale Transfer of Graphene

被引:0
|
作者
Shang, Mingpeng [1 ,2 ,3 ]
Bu, Saiyu [4 ]
Hu, Zhaoning [3 ,4 ]
Zhao, Yixuan [2 ,3 ]
Liao, Junhao [1 ,2 ,3 ,5 ]
Zheng, Chunyang [1 ,2 ,3 ,6 ]
Liu, Wenlin [2 ,3 ]
Lu, Qi [3 ,7 ]
Li, Fangfang [1 ,3 ]
Wu, Haotian [4 ]
Shi, Zhuofeng [4 ,8 ]
Zhu, Yaqi [4 ,8 ]
Xu, Zhiying [4 ,9 ]
Guo, Bingbing [3 ]
Yu, Beiming [4 ]
Li, Chunhu [9 ]
Zhang, Xiaodong [8 ]
Xie, Qin [1 ,2 ,3 ]
Yin, Jianbo [3 ,6 ]
Jia, Kaicheng [3 ]
Peng, Hailin [1 ,2 ,3 ]
Lin, Li [1 ,3 ,4 ]
Liu, Zhongfan [2 ,3 ]
机构
[1] Peking Univ, Acad Adv Interdisciplinary Studies, Beijing 100871, Peoples R China
[2] Peking Univ, Beijing Natl Lab Mol Sci, Coll Chem & Mol Engn, Ctr Nanochem, Beijing 100871, Peoples R China
[3] Beijing Graphene Inst, Technol Innovat Ctr Graphene Metrol & Standardizat, Beijing 100095, Peoples R China
[4] Peking Univ, Sch Mat Sci & Engn, Beijing 100871, Peoples R China
[5] Natl Ctr Nanosci & Technol, Beijing 100190, Peoples R China
[6] Peking Univ, Sch Elect, Beijing 100871, Peoples R China
[7] China Univ Petr, Coll Sci, State Key Lab Heavy Oil Proc, Beijing 102249, Peoples R China
[8] Qingdao Univ, Coll Chem & Chem Engn, Qingdao 266000, Peoples R China
[9] Ocean Univ China, Coll Chem & Chem Engn, Lab Marine Chem Theory & Technol, Minist Educ, Qingdao 266100, Peoples R China
基金
中国国家自然科学基金; 中国博士后科学基金;
关键词
carrier mobility; chemical vapor deposition; encapsulation; graphene single-crystalline wafer; graphene transfer; LARGE-AREA; 2-DIMENSIONAL MATERIALS; PHOTODETECTOR; STRAIN;
D O I
10.1002/adma.202402000
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
The disparity between growth substrates and application-specific substrates can be mediated by reliable graphene transfer, the lack of which currently strongly hinders the graphene applications. Conventionally, the removal of soft polymers, that support the graphene during the transfer, would contaminate graphene surface, produce cracks, and leave unprotected graphene surface sensitive to airborne contaminations. In this work, it is found that polyacrylonitrile (PAN) can function as polymer medium for transferring wafer-size graphene, and encapsulating layer to deliver high-performance graphene devices. Therefore, PAN, that is compatible with device fabrication, does not need to be removed for subsequent applications. The crack-free transfer of 4 in. graphene onto SiO2/Si wafers, and the wafer-scale fabrication of graphene-based field-effect transistor arrays with no observed clear doping, uniformly high carrier mobility (approximate to 11 000 cm2 V-1 s-1), and long-term stability at room temperature, are achieved. This work presents new concept for designing the transfer process of 2D materials, in which multifunctional polymer can be retained, and offers a reliable method for fabricating wafer-scale devices of 2D materials with outstanding performance. Herein, by using polyacrylonitrile as the transfer medium and encapsulating layer, wafer-scale graphene transfer, devices fabrication, and efficient encapsulation against the airborne contaminations are successfully achieved, and the transferred graphene delivers improved electronic performances and long-term stability, offering a reliable method for fabricating wafer-scale devices of 2D materials with outstanding electronic quality. image
引用
收藏
页数:8
相关论文
共 50 条
  • [1] WAFER-SCALE TRANSFER OF GRAPHENE BY ADHESIVE WAFER BONDING
    Quellmalz, Arne
    Wang, Xiaojing
    Wagner, Stefan
    Lemme, Max
    Gylfason, Kristinn B.
    Roxhed, Niclas
    Stemme, Goran
    Niklaus, Frank
    2019 IEEE 32ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2019, : 257 - 259
  • [2] Wafer-scale synthesis and transfer of monolayer graphene
    Wang Xueshen
    Li Jinjin
    Zhong Qing
    Zhong Yuan
    Zhao Mengke
    2013 13TH IEEE CONFERENCE ON NANOTECHNOLOGY (IEEE-NANO), 2013, : 652 - 655
  • [3] Wafer-Scale Synthesis and Transfer of Graphene Films
    Lee, Youngbin
    Bae, Sukang
    Jang, Houk
    Jang, Sukjae
    Zhu, Shou-En
    Sim, Sung Hyun
    Song, Young Il
    Hong, Byung Hee
    Ahn, Jong-Hyun
    NANO LETTERS, 2010, 10 (02) : 490 - 493
  • [4] Direct transfer of wafer-scale graphene films
    Kim, Maria
    Shah, Ali
    Li, Changfeng
    Mustonen, Petri
    Susoma, Jannatul
    Manoocheri, Farshid
    Riikonen, Juha
    Lipsanen, Harri
    2D MATERIALS, 2017, 4 (03):
  • [5] Wafer-scale Graphene Synthesis, Transfer and FETs
    Teo, K. B. K.
    You, B.
    Rupesinghe, N. L.
    Newham, A.
    Greenwood, P.
    Buttress, S.
    Cole, M. T.
    Tao, L.
    Lee, J.
    Akinwande, D.
    Celebi, K.
    Park, H. G.
    Sun, J.
    2013 13TH IEEE CONFERENCE ON NANOTECHNOLOGY (IEEE-NANO), 2013, : 1200 - 1203
  • [6] Face-to-face transfer of wafer-scale graphene films
    Gao, Libo
    Ni, Guang-Xin
    Liu, Yanpeng
    Liu, Bo
    Castro Neto, Antonio H.
    Loh, Kian Ping
    NATURE, 2014, 505 (7482) : 190 - 194
  • [7] Face-to-face transfer of wafer-scale graphene films
    Libo Gao
    Guang-Xin Ni
    Yanpeng Liu
    Bo Liu
    Antonio H. Castro Neto
    Kian Ping Loh
    Nature, 2014, 505 : 190 - 194
  • [8] Sensitive Transfer-Free Wafer-Scale Graphene Microphones
    Pezone, Roberto
    Baglioni, Gabriele
    Sarro, Pasqualina M.
    Steeneken, Peter G.
    Vollebregt, Sten
    ACS APPLIED MATERIALS & INTERFACES, 2022, 14 (18) : 21705 - 21712
  • [9] Wafer-scale transfer of tungsten disulfide
    Zeissler, Katharina
    NATURE ELECTRONICS, 2022, 5 (07) : 410 - 410
  • [10] Wafer-scale transfer of tungsten disulfide
    Katharina Zeissler
    Nature Electronics, 2022, 5 : 410 - 410