[1] IBM Res Europe Zurich, CH-8803 Ruschlikon, Switzerland
[2] Swiss Fed Inst Technol, Inst Inorgan Chem, Dept Chem & Appl Biosci, CH-8093 Zurich, Switzerland
[3] Empa Swiss Fed Labs Mat Sci & Technol, Lab Thin Films & Photovolta, CH-8600 Dubendorf, Switzerland
[4] Zeiss SMT, D-73447 Oberkochen, Germany
[5] Univ Rennes, INSA Rennes, CNRS, Inst FOTON,UMR 6082, F-35000 Rennes, France