Mode-Matched Disk Resonator Gyroscope in (100) Single Crystal Silicon with Shock Resistance

被引：0

作者：

Zhai, Zhaoyang ^{[1
,2
]}

Xiong, Xingyin ^{[1
]}

Ma, Liangbo ^{[1
,2
]}

Yang, Wuhao ^{[1
]}

Wang, Bowen ^{[1
,2
]}

Qi, Zhenxiang ^{[1
,2
]}

Zou, Xudong ^{[1
,2
,3
]}

机构：

[1] Chinese Acad Sci, Aerosp Informat Res Inst, State Key Lab Transducer Technol, Beijing, Peoples R China

[2] Univ Chinese Acad Sci, Sch Elect Elect & Commun Engn, Beijing, Peoples R China

[3] QiLu Aerosp Informat Res Inst, Jinan, Peoples R China

来源：

2024 IEEE INTERNATIONAL SYMPOSIUM ON INERTIAL SENSORS AND SYSTEMS, INERTIAL | 2024年

关键词：

mode-matched; mode order; shock resistance;

D O I：

10.1109/INERTIAL60399.2024.10502108

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper proposes a novel disk resonator gyroscope (DRG) fabricated in the (100) single crystal silicon (SCS) wafer. The structure consists of an outer anchor, concentric rings, connecting spokes and inner electrodes. It operates in the N=2 wineglass mode, and the translation mode (N=1) has a higher resonant frequency, which reduces the effects of harsh shock environments and maximizes sensitivity. Mode order is achieved by adjusting the inner ring radius and the initial frequency split of the N=2 wineglass mode is reduced by adjusting the spoke angle. The prototype device was fabricated based on Silicon on Insulator (SOI) process. The experimental results of the prototype device validate the proposed novel DRG structure.

引用

页数：4

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