Machine learning-assisted smart epitaxy of III-V semiconductors

被引：0
|
作者：
Hao, Yue [1 ]
机构：
[1] Xidian Univ, Sch Microelect, Key Lab Wide Band Gap Semicond Technol, Xian 710071, Peoples R China
来源：
SCIENCE CHINA-MATERIALS | 2024年 / 67卷 / 09期
关键词：
D O I：
10.1007/s40843-024-3006-x
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：3041 / 3042
页数：2
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