TRANSFORMING AN INDUSTRY: AN INVENTOR’S TALE OF FIB IN SITU LIFT-OUT

被引：0
|
作者：
Hartfield C. [1 ]
机构：
[1] Carl Zeiss Microscopy LLC, Dublin, CA
来源：
Electronic Device Failure Analysis | 2023年 / 25卷 / 01期
关键词：
FIB lift-out; in situ lift-out; Omniprobe; TEM sample preparation;
D O I：
10.31399/asm.edfa.2023-1.p020
中图分类号：
学科分类号：
摘要：
This is the story of how the mainstream Omniprobe FIB lift-out solution was invented and delivered to the market. © ASM International.
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页码：20 / 27
页数：7
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