Study of Color Change Characteristics of Plasma Indicators by Vacuum Ultraviolet Light from Excimer Lamps

被引：0

作者：

Shimizu A. ^{[1
]}

Endo S. ^{[1
]}

Ohshiro S. ^{[2
]}

机构：

[1] Ushio Inc., 1194, Sazuchi, Bessho-cho, Hyogo, Himeji

[2] Sakura Color Products Corp., 7-18-47, Kanou, Higashiosaka, Osaka

来源：

Journal of Japan Institute of Electronics Packaging | 2023年 / 16卷

关键词：

Color Change Characteristics; Excimer Lamp; Oxygen-based Radical; Plasma Indicator; Vacuum Ultraviolet Light;

D O I：

10.5104/jiepeng.16.E21-018-1

中图分类号：

学科分类号：

摘要：

We examined the color change characteristics of two types of “Plasma Indicators” (referred to as Indicators hereinafter) irradiated by vacuum ultraviolet (VUV) light from excimer lamps. We found that the colors of both Indicators change in accordance with the sensitivity of the VUV irradiation dose when the oxygen concentration is constant. We concluded that an appropriate Indicator must be selected according to the required VUV irradiation dose of each excimer lamp application. Moreover, we demonstrated that both Indicators were useful, and the reproducibility of VUV irradiation was confirmed only under the same VUV irradiation conditions. Copyright © The Japan Institute of Electronics Packaging.

引用

页码：E210181 / E210187

页数：6

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