Scratch hardness of diamond-like carbon (DLC) coatings deposited by closed-field unbalanced magnetron sputtering

被引:0
|
作者
Lin, Yan-yan [1 ]
Deng, Zhi-jun [1 ]
Dong, Zhu-rong [1 ]
机构
[1] Shenzhen Polytech Univ, Dept Automot & Transportat Engn, 7098 Liuxian Blvd, Shenzhen 518053, Guangdong, Peoples R China
关键词
INDENTATION; SURFACES; NANOINDENTATION; RESISTANCE;
D O I
10.1063/5.0191675
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Thin coatings are subject to scratch and wear damage in tribological applications. Scratch hardness numbers are used to evaluate scratch and abrasive wear resistance. Few studies have measured the scratch hardness of thin films, and a proper scratch hardness measurement method for thin coatings is still lacking. In this study, the scratch hardness of these DLC coatings was measured at both micro-scale and nano-scale, respectively. The micro-scratch test using a 200 mu m tip is an inapplicable method because the substrate effect has dominated the scratch hardness measurement. On the other hand, a nano-scratch hardness test using a sharper tip is an effective method to measure the scratch hardness of thin coatings. Although the scratch hardness introduces a lateral force compared with the indentation hardness, it well correlates with the nano-indentation hardness. The ratio of the scratch hardness to the indentation hardness is close to 1 for DLC coatings due to the amorphous structure. It proves that the tangential force induced by scratching does not influence the hardness property. In addition, a simple approach is proposed to obtain the scratch hardness of DLC coatings qualitatively without width measurement.
引用
收藏
页数:9
相关论文
共 50 条
  • [21] Novel high wear resistant diamond-like carbon coatings deposited by magnetron sputtering of carbon targets
    Jones, A.H.S.
    Camino, D.
    Teer, D.G.
    Jiang, J.
    [J]. Proceedings of the Institution of Mechanical Engineers, Part J: Journal of Engineering Tribology, 1998, 212 (4 J4): : 301 - 306
  • [22] Tribological analysis of nano-composite diamond-like carbon films deposited by unbalanced magnetron sputtering
    Chang, YY
    Wang, DY
    Chang, CH
    Wu, WT
    [J]. SURFACE & COATINGS TECHNOLOGY, 2004, 184 (2-3): : 349 - 355
  • [23] Tribological and Electrical Properties of Chromium Doped Diamond-Like Carbon Films Deposited by Unbalanced Magnetron Sputtering
    Lee, Jaehyeong
    Kim, Nam-Hoon
    Hwang, Soohyun
    Hwang, Sung Hwan
    Park, Yong Seob
    [J]. SCIENCE OF ADVANCED MATERIALS, 2018, 10 (03) : 429 - 432
  • [24] Synthesis and mechanical properties of amorphous carbon films by closed-field unbalanced magnetron sputtering
    Myung, HS
    Park, YS
    Jung, MJ
    Hong, B
    Han, JG
    [J]. MATERIALS LETTERS, 2004, 58 (09) : 1513 - 1516
  • [25] Synthesis of CrN/AlN superlattice coatings using closed-field unbalanced magnetron sputtering process
    Kim, GS
    Lee, SY
    Hahn, JH
    Lee, SY
    [J]. SURFACE & COATINGS TECHNOLOGY, 2003, 171 (1-3): : 91 - 95
  • [26] MoS2/metal composite coatings deposited by closed-field unbalanced magnetron sputtering:: tribological properties and industrial uses
    Fox, V
    Hampshire, J
    Teer, D
    [J]. SURFACE & COATINGS TECHNOLOGY, 1999, 112 (1-3): : 118 - 122
  • [27] Friction and wear performance of unbalanced magnetron sputter-deposited diamond-like carbon multilayer coatings
    Iwamura, E
    [J]. SECOND INTERNATIONAL CONFERENCE ON PROCESSING MATERIALS FOR PROPERTIES, 2000, : 263 - 266
  • [28] MoS2/metal composite coatings deposited by closed-field unbalanced magnetron sputtering: Tribological properties and industrial uses
    Teer Coatings Ltd, 290 Hartlebury Trdg. Est., Worcs D., Hartlebury, United Kingdom
    [J]. Surf. Coat. Technol., 1-3 (118-122):
  • [29] High power impulse magnetron sputtering of diamond-like carbon coatings
    Kubart, Tomas
    Aijaz, Asim
    Andersson, Joakim
    Ferreira, Fabio
    Oliveira, Joao Carlos
    Sobetkii, Arcadie
    Parau, Anca Constantina
    Vitelaru, Catalin
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2020, 38 (04):
  • [30] EFFECT OF SUBSTRATE BIAS ON THE PROPERTIES OF DIAMOND-LIKE CARBON-FILMS DEPOSITED USING UNBALANCED MAGNETRON SPUTTERING
    SEO, SC
    INGRAM, DC
    RICHARDSON, HH
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1995, 13 (06): : 2856 - 2862