Aiming at the problems of low natural frequency and small dynamic range of the current six axis force sensor, a self-pretension piezoelectric six axis force sensor is designed and its performance is analyzed. The dynamic theoretical and mathematical model of the sensor is established, based on the established mathematical model, the changes between sensitivity, natural frequency and the sensor structural parameters of four-dimensional atlas are drawn, the variation of sensitivity and natural frequency with the structural parameters of the sensor is obtained based on method of atlas. A six-dimensional piezoelectric force sensor based on several groups of quartz wafers is developed and tested. The test results show that the designed six-dimensional force sensor has a natural frequency of 9.6 KHz and a dynamic measurement range of 3.2 KHz, which is larger than the dynamic range of the elastic six-dimensional force sensor lower than 2 KHz. It is verified that the designed six-dimension force sensor has higher natural frequency and larger dynamic range, which can meet the requirements of high dynamic range better. © 2023 Editorial Department of Journal of Chinese Inertial Technology. All rights reserved.
