[1] High-Frequency High-Voltage Device and Integrated Circuits R&D Center, Institute of Microelectronics, Chinese Academy of Sciences, Beijing,100029, China
[2] Department of Mechanical Engineering, The University of Tokyo, Bunkyo, Tokyo,113–8656, Japan
[3] University of Chinese Academy of Sciences, Beijing,100049, China
[4] Key Laboratory of Microelectronic Devices & Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing,100029, China
[5] Collaborative Research Center, Meisei University, Hino-shi, Tokyo,191–8506, Japan
[6] Integrated Circuit Advanced Process R&D Center, Institute of Microelectronics of Chinese Academy of Sciences, Beijing,100029, China