ON CONTROL OF VELOCITY OF GROWTH OF FILMS DURING MAGNETRON SPUTTERING

被引：0
|
作者：
Pankratov E.L. [1 ]
机构：
[1] Nizhny Novgorod State University, 23 Gagarin Avenue, Nizhny Novgorod
来源：
Nanoscience and Technology | 2024年 / 15卷 / 01期
关键词：
analytical approach for modeling; estimation of growth velocity; magnetrons sputtering; mass transfer;
D O I：
10.1615/NanoSciTechnolIntJ.2023048213
中图分类号：
学科分类号：
摘要：
Mass transfer during the growth of epitaxial layers in magnetrons was analyzed. We also estimate Growth velocity of the epitaxial layers was estimated and its value as a function of various parameters analyzed. © 2024 by Begell House, Inc. www.begellhouse.com.
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页码：87 / 95
页数：8
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