Microstructure and Tribological Behavior of Magnetron Sputtered WSx/W/DLC/W Multilayer Films

被引：0
|
作者：
Zheng, Xiaohua [1 ]
Liu, Tao [1 ]
Yang, Shuoyan [1 ]
Wang, Gongqi [1 ]
Yang, Fanger [1 ]
机构：
[1] College of Materials Science and Engineering, Zhejiang University of Technology, Hangzhou,310014, China
来源：
Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering | 2020年 / 49卷 / 04期
关键词：
Crystalline phasis - Diamond like carbon - Friction coefficients - Interlayer thickness - Modulation period - Nanoindenters - Silicon substrates - Tribological behaviors;
D O I：
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中图分类号：
学科分类号：
摘要：
22
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页码：1295 / 1300
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