Rotational position error correction in ptychography

被引：1

作者：

Lin, Angyi ^{[1
]}

Sheng, Pengju ^{[1
]}

Ning, Shoucong ^{[2
]}

Zhang, Fucai ^{[1
]}

机构：

[1] Southern Univ Sci & Technol, Dept Elect & Elect Engn, Shenzhen 518055, Peoples R China

[2] Natl Univ Singapore, Dept Mat Sci & Engn, Singapore 117575, Singapore

来源：

APPLIED OPTICS | 2024年 / 63卷 / 03期

基金：

中国国家自然科学基金;

关键词：

TRANSLATION; ALGORITHM;

D O I：

10.1364/AO.510143

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Accurate determination of scan positions is essential for achieving high -quality reconstructions in ptychographic imaging. This study presents and demonstrates a method for determining the rotation angle of the scan pattern relative to the detector pixel array using diffraction data. The method is based on the Fourier-Mellin transform and cross -correlation calculation. It can correct rotation errors up to 60 deg. High -quality reconstructions were obtained for visible light and electron microscopy datasets, and intricate structures of samples can be revealed. We believe that this refinement method for rotary position errors can be valuable for improving the performance of ptychographic four-dimensional scanning transmission electron microscopy. (c) 2024 Optica Publishing Group

引用

页码：804 / 809

页数：6

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