Characterization of ultra radiation hard pixel detectors for the high luminosity phase of the CMS experiment at the LHC

. - The High Luminosity upgrade of the CERN Large Hadron Collider (HL-LHC) calls for new radiation tolerant silicon pixel sensors. In the case of the CMS experiment, the innermost tracker layers will have to withstand an integrated fluence up to 2.3 x 1016 neq/cm2 (1 MeV equivalent neutrons) while preserving high tracking efficiency. In order to maintain or even improve the performance of the CMS inner tracker in this harsh environment an extensive R&D program has been put in place by the CMS collaboration targeting thin planar and 3D pixel sensors. The basic cell size of the module has an area of 25 x 100 mu m2 and an active thickness of 150 mu m. The modules are read out by the CMS Read Out Chips (CROC) built in 65 nm technology and developed by CMS and ATLAS Collaborations within the RD53 Collaboration. This contribution describes test beam results of the new 3D and planar sensor prototypes read out by a single chip, both before and after irradiation and of the first planar quad sensor, i.e., read out by four chips, before irradiation. The modules performance were evaluated in terms of hit detection efficiency and resolution. The analysis of collected data shows excellent performance even for the irradiated modules.