Molecular dynamics simulation of Mo sputtering by the Ar gas cluster ion beam

被引：0
|
作者：
Nazarov, A.V. [1 ]
Zavilgelskiy, A.D. [1 ]
机构：
[1] Skobeltsyn Institute of Nuclear Physics, SINP, MSU, 1 , Leninskie gory, GSP-1, Moscow,119991, Russia
来源：
Applied Physics | 2019年 / 05期
关键词：
Molecular dynamics;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
下载
收藏
页码：60 / 64
相关论文
共 50 条
  • [1] Damage and repair of organic and inorganic surfaces by Ar+ ion and gas cluster ion beam sputtering
    Yancey, David F.
    Reinhardt, Carl
    JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 2019, 231 : 104 - 108
  • [2] Molecular dynamics simulations for gas cluster ion beam processes
    Aoki, Takaaki
    Seki, Toshio
    Matsuo, Jiro
    VACUUM, 2010, 84 (08) : 994 - 998
  • [3] Molecular dynamics simulation of Cu and Ar ion sputtering of Cu (111) surfaces
    Kress, JD
    Hanson, DE
    Voter, AF
    Liu, CL
    Liu, XY
    Coronell, DG
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1999, 17 (05): : 2819 - 2825
  • [4] Molecular dynamics simulation of gas phase ion cluster formation
    Cabarcos, OM
    Lisy, JM
    INTERNATIONAL JOURNAL OF MASS SPECTROMETRY, 1999, 185 : 883 - 903
  • [5] GaP/Si(001) interface study by XPS in combination with Ar gas cluster ion beam sputtering
    Romanyuk, O.
    Gordeev, I.
    Paszuk, A.
    Supplie, O.
    Stoeckmann, J. P.
    Houdkova, J.
    Ukraintsev, E.
    Bartos, I.
    Jiricek, P.
    Hannappel, T.
    APPLIED SURFACE SCIENCE, 2020, 514
  • [6] Electronic structures of SiO2 thin films via Ar gas cluster ion beam sputtering
    Kyoung, Yong Koo
    Chung, Jae Gwan
    Lee, Hyung Ik
    Yun, Dong-Jin
    Lee, Jae Cheol
    Kim, Yong Su
    Oh, Suhk Kun
    Kang, Hee Jae
    SURFACE AND INTERFACE ANALYSIS, 2014, 46 : 58 - 61
  • [7] Direct characterization of graphene doping state by in situ photoemission spectroscopy with Ar gas cluster ion beam sputtering
    Yun, Dong-Jin
    Kim, Seyun
    Jung, Changhoon
    Lee, Chang-Seok
    Sohn, Hiesang
    Won, Jung Yeon
    Kim, Yong Su
    Chung, JaeGwan
    Heo, Sung
    Kim, Seong Heon
    Seol, Minsu
    Shin, Weon Ho
    PHYSICAL CHEMISTRY CHEMICAL PHYSICS, 2018, 20 (01) : 615 - 622
  • [8] Molecular dynamics study of the sputtering of Al cluster by Ar and Kr atoms
    Král, V
    CZECHOSLOVAK JOURNAL OF PHYSICS, 2005, 55 (04) : 497 - 502
  • [9] Ar cluster ion beam sputtering of InSb investigated by ToF-SIMS
    Miyasaka, Toyomitsu
    Yamauchi, Takeshi
    Nagatomi, Takaharu
    Kono, Teiichiro
    SURFACE AND INTERFACE ANALYSIS, 2014, 46 : 261 - 263
  • [10] Preferential sputtering of DNA molecules on a graphite surface by Ar cluster ion beam
    Moritani, Kousuke
    Houzumi, Shingo
    Takeshima, Keigo
    Toyoda, Noriaki
    Mochiji, Kozo
    JOURNAL OF PHYSICAL CHEMISTRY C, 2008, 112 (30): : 11357 - 11362
12345