Design of Piezoelectric Micromachined Ultrasonic Transducers Using High-Order Mode with High Performance and High Frequency

被引：0
|
作者：
Liu, Kangfu [1 ,2 ,3 ]
Lu, Yaoqing [1 ,2 ,3 ]
Wu, Sheng [1 ,2 ,3 ]
Li, Xinxin [1 ,2 ,3 ]
Wu, Tao [1 ,2 ,3 ,4 ]
机构：
[1] ShanghaiTech University, School of Information Science and Technology, Shanghai,201210, China
[2] Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai,200050, China
[3] University of Chinese Academy of Sciences, Beijing,100049, China
[4] Shanghai Engineering Research Center of Energy Efficient and Custom AI IC, Shanghai,201210, China
来源：
IEEE Open Journal of Ultrasonics, Ferroelectrics, and Frequency Control | 2023年 / 3卷
关键词：
Directivity - High frequency HF - High order mode - High sensitivity - Higher-order-mode - Micro-machined ultrasonic transducer - Piezoelectric - Piezoelectric micromachined ultrasonic transducer - Sensitivity - Shape;
D O I：
10.1109/OJUFFC.2023.3307085
中图分类号：
学科分类号：
摘要：
24
引用
收藏
页码：176 / 185
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