Research on microstructure and mechanical properties of ti-al-si-n multilayer gradient coating

被引:0
|
作者
Wu, Yan [1 ]
Wang, Bing [1 ]
Xiao, Li-Jun [1 ]
Wang, Li [1 ]
Zhang, Er-Geng [1 ]
Chen, Qiang [1 ]
Huang, Biao [1 ]
机构
[1] Shanghai Engineering Research Center of Physical Vapor Deposition (PVD) Superhard Coating and Equipment, Shanghai Institute of Technology, Shanghai,201418, China
来源
Surface Technology | 2021年 / 50卷 / 02期
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页码:232 / 237
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