Key technologies and application prospect analysis of interferometric of integrated optical gyro

被引:0
|
作者
Jiao, Hongchen [1 ,2 ]
Wang, Lingyu [1 ,2 ]
Sun, Daoxin [1 ,2 ]
Lu, Zhizhou [3 ]
Jin, Li [3 ]
Feng, Junbo [3 ]
Xu, Wenyuan [4 ]
Feng, Lishuang [1 ,2 ]
机构
[1] Beihang University, School of Instrumentation and Optoelectronic Engineering, Beijing,100191, China
[2] Beihang University, National Key Laboratory of Inertial Technology, Beijing,100191, China
[3] Chongqing United Microelectronics Center (CUMEC), Chongqing,401332, China
[4] Chongqing Zixingzhe Technology, Chongqing,402260, China
关键词
714.3 Waveguides - 804.2 Inorganic Compounds - 941.4 Optical Variables Measurements;
D O I
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中图分类号
学科分类号
摘要
Silicon nitride
引用
收藏
页码:743 / 749
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