Physical properties of sprayed antimony doped tin oxide thin films:The role of thickness附视频

<正>Transparent conducting antimony doped tin oxide（Sb:SnO2） thin films have been deposited onto preheated glass substrates using a spray pyrolysis technique by varying the quantity of spraying solution.The structural, morphological,X-ray photoelectron spectroscopy,optical,photoluminescence and electrical properties of these films have been studied.It is found that the films are polycrystalline in nature with a tetragonal crystal structure having orientation along the（211） and（112） planes.Polyhedrons like grains appear in the FE-SEM images. The average grain size increases with increasing spraying quantity.The compositional analysis and electronic behaviour of Sb:SnO2 thin films were studied using X-ray photoelectron spectroscopy.The binding energy of Sn3d5/2 for all samples shows the Sn4+ bonding state from SnO2.An intensive violet luminescence peak near 395 nm is observed at room temperature due to oxygen vacancies or donor levels formed by Sb5+ ions.The film deposited with 20 cc solution shows 70%transmittance at 550 nm leading to the highest figure of merit(2.11×10-3Ω-1). The resistivity and carrier concentration vary over 1.22×10-3 to 0.89×10-3Ω·cm and 5.19×1020 to 8.52×1020 cm-3,respectively.