Ordered SrTiO Nanoripples Induced by Focused Ion Beam

被引:0
|
作者
Jiang Wu [1 ]
Gang Chen [2 ]
Zhaoquan Zeng [3 ]
Shibin Li [1 ]
Xingliang Xu [1 ]
Zhiming MWang [1 ,3 ]
Gregory JSalamo [3 ]
机构
[1] State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China
[2] Institute of Intelligent Optoelectronic Technology, Zhejiang University of Technology
[3] Institute for Nanoscience and Engineering, University of
关键词
D O I
暂无
中图分类号
O614.232 [];
学科分类号
摘要
Ordered nanoripples on the niobium-doped SrTiO3 surfaces were fabricated through focused ion beam bombardment. The surface morphology of the SrTiO3 nanoripples was characterized using in situ focused ion beam/scanning electron microscopy. The well-aligned SrTiO3 nanostructures were obtained under optimized ion irradiation conditions. The characteristic wavelength was measured as about 210 nm for different ion beam currents. The relationship between the ion irradiation time and current and SrTiO3 surface morphology was analyzed. The presented method will be an effective supplement for fabrication of SrTiO3 nanostructures that can be used for ferroelectric and electronic applications.
引用
收藏
页码:243 / 246
页数:4
相关论文
共 50 条
  • [31] Ion beam-induced nanoripples patterns for SERS based saliva analysis to detect oral cavity cancer
    Augustine, Sebin
    Hole, Arti
    Sooraj, K. P.
    Saini, Mahesh
    Deshmukh, Atul
    Gota, Vikram
    Chaturvedi, Pankaj
    Ranjan, Mukesh
    Murali Krishna, C.
    RADIATION EFFECTS AND DEFECTS IN SOLIDS, 2024,
  • [32] Investigation of deposited Pt films induced by focused ion beam
    Liu, LJ
    Wang, JJ
    SOLID-STATE AND INTEGRATED-CIRCUIT TECHNOLOGY, VOLS 1 AND 2, PROCEEDINGS, 2001, : 1087 - 1090
  • [33] Chemically Induced Phase Transformation in Austenite by Focused Ion Beam
    Basa, Adina
    Thaulow, Christian
    Barnoush, Afrooz
    METALLURGICAL AND MATERIALS TRANSACTIONS A-PHYSICAL METALLURGY AND MATERIALS SCIENCE, 2014, 45A (03): : 1189 - 1198
  • [34] Effects of focused ion beam induced damage on the plasticity of micropillars
    El-Awady, Jaafar A.
    Woodward, Christopher
    Dimiduk, Dennis M.
    Ghoniem, Nasr M.
    PHYSICAL REVIEW B, 2009, 80 (10)
  • [35] FOCUSED-ION BEAM-INDUCED DEPOSITION OF COPPER
    DELLARATTA, AD
    MELNGAILIS, J
    THOMPSON, CV
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1993, 11 (06): : 2195 - 2199
  • [36] Focused ion beam induced deposition of platinum for repair processes
    Tao, Tao
    Wilkinson, William
    Melngailis, John
    Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics, 1991, 9 (01): : 162 - 164
  • [37] Focused ion beam induced surface amorphization and sputter processes
    Basnar, B
    Lugstein, A
    Wanzenboeck, H
    Langfischer, H
    Bertagnolli, E
    Gornik, E
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2003, 21 (03): : 927 - 930
  • [38] Focused-ion-beam-induced deposition of superconducting nanowires
    Sadki, ES
    Ooi, S
    Hirata, K
    APPLIED PHYSICS LETTERS, 2004, 85 (25) : 6206 - 6208
  • [39] Focused ion beam induced deflections of freestanding thin films
    Kim, Y. -R.
    Chen, P.
    Aziz, M. J.
    Branton, D.
    Vlassak, J. J.
    JOURNAL OF APPLIED PHYSICS, 2006, 100 (10)
  • [40] Focused ion beam-induced droplet formation and motion
    Stout, J. M.
    Freund, J. B.
    Johnson, H. T.
    JOURNAL OF APPLIED PHYSICS, 2019, 126 (08)