GEOMETRICAL CORRECTION FACTOR FOR SEMICONDUCTOR RESISTIVITY MEASUREMENTS BY 4-POINT PROBE METHOD

被引：68
|
作者：
YAMASHITA, M
AGU, M
机构：
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1984年 / 23卷 / 11期
关键词：
D O I：
10.1143/JJAP.23.1499
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：1499 / 1504
页数：6
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