GEOMETRICAL CORRECTION FACTOR FOR SEMICONDUCTOR RESISTIVITY MEASUREMENTS BY 4-POINT PROBE METHOD

被引：68

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作者：

YAMASHITA, M

AGU, M

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1984年 / 23卷 / 11期

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D O I：

10.1143/JJAP.23.1499

中图分类号：

O59 [应用物理学];

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页码：1499 / 1504

页数：6

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