HIGH-TEMPERATURE HIGH-PURITY SOURCE FOR METAL BEAM EPITAXY

被引：13
|
作者：
FARROW, RFC
WILLIAMS, GM
机构：
来源：
THIN SOLID FILMS | 1978年 / 55卷 / 02期
关键词：
D O I：
10.1016/0040-6090(78)90062-7
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：303 / 315
页数：13
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