ABERRATIONS AND TOLERANCES IN A DOUBLE-DEFLECTION ELECTRON-BEAM SCANNING SYSTEM

被引：6

作者：

THOMSON, MGR ^{[1
]}

机构：

[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1975年 / 12卷 / 06期

关键词：

D O I：

10.1116/1.568480

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1156 / 1159

页数：4

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