MEASUREMENT OF ION TEMPERATURE IN ELECTRON-CYCLOTRON-RESONANCE PLASMA

被引：0
|
作者：
OKUNO, Y
OHTSU, Y
FUJITA, H
CHEN, W
MIYAKE, S
机构：
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1993年 / 32卷 / 11B期
关键词：
ECR MICROWAVE PLASMA; ION TEMPERATURE; DIRECTIONAL ANALYZER; OPTICAL EMISSION SPECTROSCOPY; DOPPLER PROFILE;
D O I：
暂无
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Ion temperatures parallel and perpendicular to an applied magnetic field are measured in electron cyclotron resonance (ECR) plasmas under a divergent or a mirror magnetic field configuration using a directional analyzer. The temperatures obtained as a function of gas pressure are found to be low (0.2 approximately 0.5 eV) and are compared with those measured by optical emission spectroscopy of Doppler profiles. The temperatures perpendicular to the magnetic field from the two different methods agree well for both magnetic configurations. The reliability of the measurement using the directional analyzer is discussed considering the ion motions in the sheath in front of the analyzer and in the magnetic field.
引用
收藏
页码：L1698 / L1700
页数：3
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