LASER DEPOSITION AND PATTERNING OF HIGH-TEMPERATURE SUPERCONDUCTING THIN-FILMS

被引:0
|
作者
KOLINSKY, PV
MAY, P
WELCH, CC
机构
[1] Hirst Research Cent
来源
GEC JOURNAL OF RESEARCH | 1988年 / 6卷 / 03期
关键词
Bismuth Compounds--Electric Conductivity - Ceramic Materials--Thin Films - Etching--Laser Applications - Oxides;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Thin films (2-3 μm) of the high temperature superconducting ceramic Bi-Sr-Ca-Cu-O have been successfully deposited onto MgO substrates using a 'free lasing' infra-red Nd:YAG laser. These films show metallic resistance behavior, with superconducting transitions starting at about 90K and reaching zero resistance at 80K. The post deposition bake cycle was optimized and the dependence of electrical behavior upon deposition temperature was investigated. It was found that films deposited on cold substrates gave bismuth rich films, whilst films deposited on hot (>500°C) substrates gave bismuth poor films. The optimum temperature for accurate stoichiometric transfer of material was found to be 450°C. The films were subsequently patterned using a laser etch 'direct write' technique to form constrictions through which the critical current could be measured. Values as high as 34,000 Acm-2 were obtained.
引用
收藏
页码:162 / 169
页数:8
相关论文
共 50 条
  • [31] DEPOSITION AND PROPERTIES OF HIGH CRITICAL-TEMPERATURE SUPERCONDUCTING CERAMIC THIN-FILMS
    KULA, W
    SOBOLEWSKI, R
    GIERLOWSKI, P
    JUNG, G
    KONOPKA, A
    KONOPKA, J
    LEWANDOWSKI, SJ
    THIN SOLID FILMS, 1989, 174 : 249 - 254
  • [32] Pulsed-laser deposition and characterization of high-temperature superconducting films
    Bäuerle, D
    Pedarnig, JD
    Rössler, R
    Stockinger, C
    Markowitsch, W
    Lang, W
    Durrell, JH
    Evetts, JE
    LASER-ASSISTED MICROTECHNOLOGY 2000, 2001, 4157 : 220 - 227
  • [33] HIGH-TEMPERATURE OXYGEN-TRANSPORT STUDY OF SUPERCONDUCTING BISRCACUO THIN-FILMS
    VAITKUS, R
    SHIRAISHI, T
    ASANO, H
    PHYSICA C, 1991, 185 : 857 - 858
  • [34] PULSED LASER DEPOSITION - A VIABLE PROCESS FOR SUPERCONDUCTING THIN-FILMS
    DUTTA, B
    WU, XD
    INAM, A
    VENKATESAN, T
    SOLID STATE TECHNOLOGY, 1989, 32 (02) : 106 - 110
  • [35] MAGNETIC PENETRATION DEPTH MEASUREMENTS ON HIGH-TEMPERATURE SUPERCONDUCTING THIN-FILMS AND THEIR IMPLICATIONS
    ANDREONE, A
    CASSINESE, A
    CANTONI, C
    DICHIARA, A
    GRANOZIO, FM
    SALLUZZO, M
    VAGLIO, R
    NUOVO CIMENTO DELLA SOCIETA ITALIANA DI FISICA D-CONDENSED MATTER ATOMIC MOLECULAR AND CHEMICAL PHYSICS FLUIDS PLASMAS BIOPHYSICS, 1994, 16 (10-11): : 1909 - 1915
  • [36] HIGH-TEMPERATURE SUPERCONDUCTING THIN-FILMS - PROCESSING AND ITS REALIZATION FOR DEVICE FABRICATION
    OGALE, SB
    JOURNAL OF SCIENTIFIC & INDUSTRIAL RESEARCH, 1990, 49 (11): : 560 - 562
  • [37] MICROWAVE CHARACTERIZATION OF HIGH-TEMPERATURE SUPERCONDUCTING THIN-FILMS USING STRIPLINE RESONATORS
    MACDONALD, AD
    LONG, SA
    WILLIAMS, JT
    JACKSON, DR
    LICHTENBERG, CL
    DAVIS, ML
    WOSIK, JL
    WOLFE, JC
    MICROWAVE AND OPTICAL TECHNOLOGY LETTERS, 1990, 3 (06) : 221 - 224
  • [38] NEAR-SURFACE STOICHIOMETRY OF HIGH-TEMPERATURE SUPERCONDUCTING YBACUO THIN-FILMS
    DREHMAN, AJ
    DUMAIS, MW
    HORRIGAN, JA
    WANG, GC
    LIEW, YF
    JOURNAL OF MATERIALS RESEARCH, 1990, 5 (07) : 1392 - 1396
  • [39] NATURE OF THE PULSED LASER PROCESS FOR THE DEPOSITION OF HIGH-TC SUPERCONDUCTING THIN-FILMS
    VENKATESAN, T
    WU, XD
    INAM, A
    JEON, Y
    CROFT, M
    CHASE, EW
    CHANG, CC
    WACHTMAN, JB
    ODOM, RW
    DIBROZOLO, FR
    MAGEE, CA
    APPLIED PHYSICS LETTERS, 1988, 53 (15) : 1431 - 1433
  • [40] EPITAXIAL CEO2 FILMS AS BUFFER LAYERS FOR HIGH-TEMPERATURE SUPERCONDUCTING THIN-FILMS
    WU, XD
    DYE, RC
    MUENCHAUSEN, RE
    FOLTYN, SR
    MALEY, M
    ROLLETT, AD
    GARCIA, AR
    NOGAR, NS
    APPLIED PHYSICS LETTERS, 1991, 58 (19) : 2165 - 2167