MEASUREMENT OF SURFACE OXYGEN-CONTENT IN SILICON-NITRIDE POWDERS

被引：0

作者：

WATANABE, K ^{[1
]}

TAKATSU, S ^{[1
]}

SATO, M ^{[1
]}

TAJIMA, Y ^{[1
]}

机构：

[1] NGK SPARK PLUG CO LTD,NTK TECH CERAM,DEPT PROD PLANNING & DEV,AICHI 485,JAPAN

来源：

NIPPON SERAMIKKUSU KYOKAI GAKUJUTSU RONBUNSHI-JOURNAL OF THE CERAMIC SOCIETY OF JAPAN | 1993年 / 101卷 / 12期

关键词：

SILICON NITRIDE; POWDER; SURFACE OXYGEN; XPS; CHEMICAL ANALYSIS;

D O I：

暂无

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Surface oxygen content in as received and oxidized silicon nitride powders was measured by X-ray photoelectron spectroscopy (XPS) analysis and chemical analysis. In the as received powders, the average difference in the measured values by the two methods was about 40%. It is suggested that the difference is due to some irrelevancies of the models on which these methods are based. On the other hand, the correlation of the results for the oxidized powders was reasonable. The agreement between the increment of the surface oxygen content and that of the total oxygen content in the oxidized powders was better for the XPS measurements.

引用

页码：1419 / 1422

页数：4

共 50 条

[21] OXYGEN-CONTENT OF HEAVILY DOPED SILICON
PEARCE, CW
JACCODINE, RJ
FILO, AJ
LIN, W
APPLIED PHYSICS LETTERS, 1985, 46 (09) : 887 - 889
[22] TRANSFORMATION OF SILICON-NITRIDE IN OXYGEN PLASMA
JIMENEZ, C
PERRIERE, J
VICKRIDGE, I
ENARD, JP
ALBELLA, JM
SURFACE & COATINGS TECHNOLOGY, 1991, 45 (1-3): : 147 - 154
[23] COMPARISON OF THE SURFACE-CHARGE BEHAVIOR OF COMMERCIAL SILICON-NITRIDE AND SILICON-CARBIDE POWDERS
WHITMAN, PK
FEKE, DL
JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1988, 71 (12) : 1086 - 1093
[24] ULTRAMICROHARDNESS MEASUREMENT OF SILICON-NITRIDE FILMS
CAI, X
WANG, JF
ZHOU, PN
ZHEN, ZH
SILICON NITRIDE 93, 1994, 89-9 : 547 - 551
[25] TRIBOLOGY OF SILICON-NITRIDE SILICON-NITRIDE AND SILICON-NITRIDE STEEL SLIDING PAIRS
SUTOR, PA
AMERICAN CERAMIC SOCIETY BULLETIN, 1983, 62 (11): : 1246 - 1246
[26] MEASUREMENT OF BLOOD OXYGEN-CONTENT BY COULOMETRY
JACQUOT, C
LABROUSSE, J
BALESTRE, MN
LISSAC, J
NOUVELLE PRESSE MEDICALE, 1974, 3 (07): : 385 - 385
[27] HOT-PRESSING AND PROPERTIES OF SILICON-NITRIDE POWDERS
GRATHWOHL, G
HANNA, SB
THUMMLER, F
TRANSACTIONS AND JOURNAL OF THE BRITISH CERAMIC SOCIETY, 1982, 81 (06): : 193 - 196
[28] SURFACE OXIDATION OF SILICON-NITRIDE FILMS
RAIDER, SI
FLITSCH, R
ABOAF, JA
PLISKIN, WA
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1976, 123 (04) : 560 - 565
[29] SYNTHESIS OF SILICON AND SILICON-NITRIDE POWDERS BY VAPOR-PHASE REACTIONS
JONG, BW
SLAVENS, GJ
TRAUT, DE
JOURNAL OF MATERIALS SCIENCE, 1992, 27 (22) : 6086 - 6090
[30] RAPID-DETERMINATION OF OXYGEN IN SILICON-NITRIDE
BULANOVA, EA
VASSERMAN, AM
INDUSTRIAL LABORATORY, 1990, 56 (06): : 629 - 631

← 1 2 3 4 5 →