Adaptive MOEMS Based Micro Pressure Sensor Using Photonic Crystal

The Micro Opto Electro Mechanical System (MOEMS) is a most promising cutting-edge technology development that uses recent trends and has huge potential for use in sensing applications. This simulation study describes the Photonic Crystal-(PhC) based micro pressure sensor, which is highly position-sensitive and free from external electromagnetic interference. Functionality of MOEMS in the photonic crystal-based micro pressure sensor is achieved through the movement of the two piston-shaped slab structures analysed in Rods in Air (RIA) and Holes in Slab (HIS) that belong to photonic crystal configurations. Displacement of the micro cavity due to applied pressure gives rise to shifts in wavelength. It is found that for each submicron displacement starting from 0 to 0.25 mm of the piston-shaped slab that is embedded, an approximate range of wavelength shift of 0.0001 for rods in air and for holes in slab configurations occurs. The simulation design shows a remarkable response in terms of intensity shift for desirable range of wavelengths 1.36 mu m to 1.44 mu m for RIA and 1.377 to 1.382 for HIS, thus confirming that wavelength is adaptable. The performance parameters such as Q factor and deflection range for wavelength and intensity are observed for both RIA and HIS configurations and it is found that the sensor with the HIS configuration shows better performance with Q factor of 15897 compared with the sensor with RIA configuration, which remained at a Q factor of 2482. Deformation of structure for applied pressure exhibits a linear relationship with a resonant wavelength shift. Structural variation in relation to wavelength shift exhibits a pressure sensitivity of 58.4 mu m/Pa and 0.98 mu m/mu Pa for each configuration.