HIGH-TEMPERATURE ELECTRICAL INSULATING PROPERTIES OF RF MAGNETRON SPUTTERED ALUMINA COATINGS ON COPPER

被引：0
|
作者：
VUORISTO, P
MANTYLA, T
KETTUNEN, P
机构：
来源：
PLASMA SURFACE ENGINEERING, VOLS 1 AND 2 | 1989年
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T [工业技术];
学科分类号：
08 ;
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页码：609 / 616
页数：8
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