SUBSURFACE COBALT DIFFUSION IN SILICON SINGLE-CRYSTAL FROM INFINITESIMALLY SMALL COBALT DIFFUSION SOURCE

被引：5
|
作者：
APPELBAUM, A
MALM, DL
MURARKA, SP
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1987年 / 5卷 / 04期
关键词：
D O I：
10.1116/1.583680
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：858 / 864
页数：7
相关论文
共 50 条
  • [21] SPUTTERING YIELD MEASUREMENTS ON SINGLE-CRYSTAL COBALT
    CHERNYSH, VS
    JOHANSEN, A
    SARHOLTKRISTENSEN, L
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1981, 191 (1-3): : 253 - 258
  • [22] ANISOTROPY OF GALVANOMAGNETIC EFFECTS IN A COBALT SINGLE-CRYSTAL
    KONDORSKII, EI
    GALKINA, OS
    IVANOVSKII, VI
    CHEREMUSHKINA, AV
    USAROV, UT
    ZHURNAL EKSPERIMENTALNOI I TEORETICHESKOI FIZIKI, 1973, 65 (05): : 1959 - 1962
  • [23] Optical, electrical, and diffusion properties of hafnium and zirconium in single-crystal silicon
    Sachdeva, R
    Istratov, AA
    Radetic, T
    Xu, X
    Deenapanray, PNK
    Weber, ER
    PHYSICA B-CONDENSED MATTER, 2006, 376 : 420 - 423
  • [24] Silicon self-diffusion in single-crystal natural quartz and feldspar
    Cherniak, DJ
    EARTH AND PLANETARY SCIENCE LETTERS, 2003, 214 (3-4) : 655 - 668
  • [25] DIFFUSION OF SULFUR IN TUNGSTEN SINGLE-CRYSTAL
    IOVKOV, VP
    PANOV, AS
    RYABENKO, AV
    FIZIKA METALLOV I METALLOVEDENIE, 1972, 34 (06): : 1322 - 1323
  • [26] THE DIFFUSION OF HYDROGEN IN SINGLE-CRYSTAL GERMANIUM
    FRANK, RC
    THOMAS, JE
    JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1960, 16 (1-2) : 144 - 151
  • [27] Iron Diffusion in Single-Crystal Diopside
    F. Azough
    R. Freer
    Physics and Chemistry of Minerals, 2000, 27 : 732 - 740
  • [28] Iron diffusion in single-crystal diopside
    Azough, F
    Freer, R
    PHYSICS AND CHEMISTRY OF MINERALS, 2000, 27 (10) : 732 - 740
  • [29] DIFFUSION OF COBALT IN KCL SINGLE-CRYSTALS
    DAMIEN, D
    REDDY, KV
    INDIAN JOURNAL OF PURE & APPLIED PHYSICS, 1983, 21 (03) : 133 - 136
  • [30] Formation of cobalt hydroxide single-crystal platelets from pulsed laser deposited cobalt thin film
    Kwong, H. Y.
    Wong, Y. W.
    JOURNAL OF ALLOYS AND COMPOUNDS, 2010, 497 (1-2) : 267 - 271
12345