SUBSURFACE COBALT DIFFUSION IN SILICON SINGLE-CRYSTAL FROM INFINITESIMALLY SMALL COBALT DIFFUSION SOURCE

被引：5
|
作者：
APPELBAUM, A
MALM, DL
MURARKA, SP
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1987年 / 5卷 / 04期
关键词：
D O I：
10.1116/1.583680
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：858 / 864
页数：7
相关论文
共 50 条
  • [1] DIFFUSION OF COBALT IN SINGLE-CRYSTAL ALPHA-TITANIUM
    NAKAJIMA, H
    KOIWA, M
    MINONISHI, Y
    ONO, S
    TRANSACTIONS OF THE JAPAN INSTITUTE OF METALS, 1983, 24 (10): : 655 - 660
  • [2] DIFFUSION OF BORON INTO POLYCRYSTALLINE SILICON FROM A SINGLE-CRYSTAL SOURCE
    RAUSCH, WA
    LEVER, RF
    KASTL, RH
    JOURNAL OF APPLIED PHYSICS, 1983, 54 (08) : 4405 - 4407
  • [3] Volume diffusion of iron, cobalt, and rhodium in single-crystal iridium
    Ermakov, AV
    Klotsman, SM
    Matveev, SA
    Tatarinova, GN
    Timofeev, AN
    Kuz'menko, GF
    Rudenko, VK
    Timofeev, NI
    PHYSICS OF METALS AND METALLOGRAPHY, 2004, 97 (05): : 507 - 513
  • [4] ISOTOPE EFFECT FOR DIFFUSION OF COBALT IN SINGLE-CRYSTAL ALPHA-TITANIUM
    NAKAJIMA, H
    ISHIOKA, S
    KOIWA, M
    PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES, 1985, 52 (06): : 743 - 751
  • [5] STRONTIUM AND SILICON SIMULTANEOUS DIFFUSION IN SINGLE-CRYSTAL MGO
    SAKAGUCHI, I
    YURIMOTO, H
    SUENO, S
    JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1992, 75 (12) : 3477 - 3480
  • [6] EFFECT OF GERMANIUM ON OXYGEN DIFFUSION IN SINGLE-CRYSTAL SILICON
    KORLYAKOV, DN
    INORGANIC MATERIALS, 1991, 27 (07) : 1129 - 1132
  • [7] Nitrogen diffusion and interaction with dislocations in single-crystal silicon
    Alpass, C. R.
    Murphy, J. D.
    Falster, R. J.
    Wilshaw, P. R.
    JOURNAL OF APPLIED PHYSICS, 2009, 105 (01)
  • [8] Nitrogen diffusion and interaction with dislocations in single-crystal silicon
    Alpass, C.R.
    Murphy, J.D.
    Falster, R.J.
    Wilshaw, P.R.
    Journal of Applied Physics, 2009, 105 (01):
  • [9] DIFFUSION-COEFFICIENT OF COBALT IN SILICON
    KITAGAWA, H
    HASHIMOTO, K
    JAPANESE JOURNAL OF APPLIED PHYSICS, 1977, 16 (01) : 173 - 174
  • [10] PREPARATION OF SINGLE-CRYSTAL COBALT FERRITES FROM MELT
    HORN, FH
    JOURNAL OF APPLIED PHYSICS, 1962, 33 (09) : 2832 - &
12345