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- [2] XRD and XTEM investigation of polycrystalline silicon carbide on polycrystalline silicon MATERIALS FOR MECHANICAL AND OPTICAL MICROSYSTEMS, 1997, 444 : 81 - 86
- [4] Polycrystalline silicon carbide for surface micromachining NINTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS, IEEE PROCEEDINGS: AN INVESTIGATION OF MICRO STRUCTURES, SENSORS, ACTUATORS, MACHINES AND SYSTEMS, 1996, : 234 - 238
- [8] Creep of silicon nitride/silicon carbide ceramic nanocomposites CREEP DEFORMATION: FUNDAMENTALS AND APPLICATIONS, 2002, : 247 - 256
- [9] STRUCTURE OF POLYCRYSTALLINE SILICON-CARBIDE FAILURE DOPOVIDI AKADEMII NAUK UKRAINSKOI RSR SERIYA A-FIZIKO-MATEMATICHNI TA TECHNICHNI NAUKI, 1976, (11): : 1038 - 1040
- [10] Electrical characteristics of rectifying polycrystalline silicon/silicon carbide heterojunctions Journal of Electronic Materials, 1998, 27 : 296 - 299